Project Goals
The presence of millions of transistors on the surface in the order of
1mm² results in very localized heating in these
electronic
components. These ‘hot spots’, which can go up to
several
tens of degrees Celsius above the average temperature of the device,
can be a source of tampering of the features of the
component.
The increasing complexity of electronic systems, whose integration is
now three-dimensional, makes it even more difficult to evacuate the
heat. The project, COFISIS’ goal is using
nanotechnology
to, 1) Reduce the temperature of the localized hot spots in the
electronic systems and integrated circuits, with acceptable
manufacturing costs, 2) Recover the thermal energy "wasted" by the
components to reduce the consumption of energy by the electronic
systems.
Principle
- Using high power thermoelectric superlattices.
A superlattice = multilayer
structure consisting of two materials with a succession of
potential barriers.
- When the barriers are sufficiently small, the emergence of
a ballistic thermionic transport can dramatically increase the
thermoelectric power of the superlattices
when compared to the bulk
material, even including the filtering of the most energetic
electrons.
- The proliferation of interfaces reduces the conduction of
phonons, which are the main drivers of heat.
The project COFISIS proposes to make super-vertical lattices directly
into the silicon, and not by successive deposits of planar layers to
provide a technology compatible with industrial manufacturing processes
and significantly reduce manufacturing costs.
Challenges
- Fabrication of super-vertical lattices whose width between
layers are
sufficiently low for even partially optimized ballistic thermionic
transport.
- Development of mathematical models for the
heat conduction in heterogeneous nanostructures to help the
optimization of superlattices.
- Developing tools for measurement of the heat
conduction and thermoelectric power, correct to the nanometric scale.
Organisation

Main actors in the project:
@ ESIEE Paris: Jaya Parasuraman (
PhD
student), Philippe Basset, Frédéric
Marty, Tarik Bourouina
@ CETHIL: Carolina Abs da Cruz (PhD
student), Patrice Chantrenne,
Séverenne Gomez, Stephane Lefevre, Konstantinos Termentzidis
@ MATEIS: Mathieu Bardoux (post-doc),
Xavier Kleber
@ MBDA France: Francois Conseil
@ LPMDI: Yamin Leprince
Related
publications
Journals
"Thermal Conductivity and Thermal Boundary Resistance of Nanostructures",
K. Termentzidis, J. Parasuraman, C. Abs Da Cruz, S. Merabia, D.
Angelescu, F. Marty, T. Bourouina, X. Kleber, P. Chantrenne and
Philippe Basset, Nanoscale Research Letters, vol. 6:288, 2011
Conferences
-
"Development of vertical superlattices in silicon for on-chip thermal management", J. Parasuraman, M. Bardoux, D. Angelescu,
P. Basset and T. Bourouina, Proceeding of the 16th International workshop on Thermal investigations of ICs and Systems, Barcelona (THERMINIC'10), Barcelona, Spain, 2010
- "Development of vertical superlattices in silicon for on-chip thermal
management”, J. Parasuraman, P. Basset and M. Bardoux, Proceeding of the 6th Conference on Ph.D. Research in Microelectronics & Electronics
(PRIME’10), Berlin, Germany, 2010
- "Collective
Fabrication of Inexpensive
Superlatices in Silicon for the thermal management of electronic
systems", P. Basset, P.
Chantrenne and X. Kleber, 4th European
Advanced Technology Workshop On Micropackaging and Thermal
Management, La Rochelle, France,
2009